Silicon Wafer Processing introduction

carffy

Good materials for semicondutor manufacturing.

【文件名】:06529@52RD_Silicon_Wafer_Processing.pdf
【格　式】:pdf
【大　小】:1419K
【简　介】:
【目　录】:
Introduction ................................................................................................................ 2
Preparation of the Silicon Wafer Media...................................................................... 3
Crystal Growth and Wafer Slicing Process
Thickness Sorting
Lapping & Etching Processes
Thickness Sorting and Flatness Checking
Polishing Process
Final Dimensional and Electrical Properties Qualification
Silicon Wafer Processing Steps ................................................................................. 8
Fabrication
Diffusion
Coat-Bake
Align
Develop
Dry etch
Wet etch & clean
Photolithography
Implant / Masking Steps
Die Attach / Wire Bond
Encapsulation
Lead Finish / Trim and Form
Final Testing / Shipping